Silicon nitride optimisation for a-Si:H TFTs used in projection LC-TVs

Materials Research Society Symposium Proceedings

Volumn 336, Issue , 1994, Pages 769-774

  French, I D ^a   Curling, C J ^a   Goodyear, A L ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BUDGET CONTROL; ETCHING; NITRIDES; SILICON NITRIDE; THIN FILM TRANSISTORS;

ELECTRICAL CHARACTERISTIC; ELECTRICAL PERFORMANCE; EXPERIMENTAL DESIGN TECHNIQUES; LARGE-AREA ELECTRONICS; MECHANICAL STRESS; MULTI-LAYER DEVICES; PROJECTION DISPLAYS; STORAGE CAPACITOR;

AMORPHOUS SILICON;

EID: 84897678239     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-336-769     Document Type: Conference Paper

References (0)