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Volumn 336, Issue , 1994, Pages 97-102
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Amorphous silicon films from dichlorosilane and hydrogen
a a |
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Author keywords
[No Author keywords available]
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Indexed keywords
CHLORINE COMPOUNDS;
DEFECTS;
DILUTION;
GLOW DISCHARGES;
GROWTH RATE;
HYDROGEN;
PHOTOCONDUCTIVITY;
SILICON COMPOUNDS;
THIN FILMS;
AMORPHOUS SILICON FILM;
CHEMICAL COMPOSITIONS;
DARK CONDUCTIVITY;
HYDROGEN DILUTION;
HYDROGEN DILUTION RATIO;
OPTOELECTRONIC PROPERTIES;
TRIODE GLOW DISCHARGE;
VOLTAGE CHARACTERISTICS;
AMORPHOUS SILICON;
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EID: 84897584257
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-336-97 Document Type: Conference Paper |
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Times cited : (13)
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References (0)
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