Design, fabrication and testing of a piezoelectric energy microgenerator

Microsystem Technologies

Volumn 20, Issue 4-5, 2014, Pages 1035-1040

  Alamin Dow, Ali B ^a   Bittner, Achim ^b   Schmid, Ulrich ^b   Kherani, Nazir P ^a  

^a UNIVERSITY OF TORONTO   (Canada)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY CONVERSION; NATURAL FREQUENCIES; PIEZOELECTRICITY; SEISMOLOGY; SILICON; VIBRATIONS (MECHANICAL);

ELECTRICAL RESPONSE; FABRICATED DEVICE; FABRICATION AND CHARACTERIZATIONS; PIEZOELECTRIC ENERGY; PIEZOELECTRIC THIN FILMS; SILICON CANTILEVER BEAM; SILICON MICROMACHINING TECHNOLOGY; VIBRATIONAL EXCITATION;

FABRICATION;

EID: 84897546044     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-014-2116-9     Document Type: Conference Paper

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