A micromachined tunable cavity resonator

Conference Proceedings - 33rd European Microwave Conference, EuMC 2003

Volumn 2, Issue , 2003, Pages 675-677

  Mercier, D ^a   Chatras, M ^a   Orlianges, J C ^b   Champeaux, C ^b   Catherinot, A ^b   Blondy, P ^a   Cros, D ^a   Papapolymerou, J ^c  

^a Centre National de la Recherche Scientifique   (France)

^b SETS   (France)

^c GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS;

COPLANAR WAVEGUIDE LINES; MEMS BRIDGES; MEMS VARACTOR; MICRO-MACHINED; TUNABLE RESONATORS; TUNING RANGES; UNLOADED QUALITY FACTORS;

COPLANAR WAVEGUIDES;

EID: 84897511551     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2003.177567     Document Type: Conference Paper

References (12)

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