Sputtered thin film coatings

Coatings Technology: Fundamentals, Testing, and Processing Techniques

Volumn , Issue , 2006, Pages 31-1-31-10

  Aufderheide, Brian E ^a  

^a W H Brady Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84897057237     PISSN: None     EISSN: None     Source Type: Book    
DOI: None     Document Type: Chapter

References (5)

1. Bunshah, R. F. et al., Deposition Technologies for Films and Coatings. Park Ridge, NJ: Noyes Publications, 1982.
2. Chapman, B., Glow Discharge Processes, Sputtering and Plasma Etching. New York: Wiley, 1980.
3. Coutts, T. J., Active and Passive Thin Film Devices. New York: Academic Press, 1978.
4. Maissel, L. I. and R. Glang, Handbook of Thin Film Technology. New York: McGraw-Hill, 1970.
5. Vossen, J. L. and W. Kern, Thin Film Processes. New York: Academic Press, 1978.