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Volumn 553, Issue , 2014, Pages 7-12

Integration of atomic layer deposition CeO2 thin films with functional complex oxides and 3D patterns

(6) Coll, M a Palau, A a Gonzalez Rosillo, J C a Gazquez, J a Obradors, X a Puig, T a

a INSTITUT DE CIÈNCIA DE MATERIALS DE BARCELONA ICMAB CSIC (Spain)

Author keywords

3 Dimension structures; Area selective atomic layer deposition; Atomic layer deposition; Complex oxides; Microcontact printing; Multilayers; Resistive switching

Indexed keywords

EID: 84894899032 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.08.131 Document Type: Conference Paper

Times cited : (21)

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