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Volumn 8, Issue 8, 2012, Pages 450-456

Cold cathode sputtering in glow discharges

Author keywords

Cathode erosion; CCFL; Cold cathode; Glow discharge; Hollow cathode effect; Sputtering

Indexed keywords

COLD CATHODE TUBES; ELECTRIC DISCHARGES; ELECTRODES; EROSION; GLOW DISCHARGES; REFRACTORY METALS; SPUTTERING; SUBLIMATION;

EID: 84893654227     PISSN: 1551319X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JDT.2012.2198194     Document Type: Article
Times cited : (2)

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