Space-time discontinuous Galerkin method for wet-chemical etching of microstructures

ECCOMAS 2004 - European Congress on Computational Methods in Applied Sciences and Engineering

Volumn , Issue , 2004, Pages

  Sudirham, J J ^a   Van Damme, R M J ^a   Van Der Vegt, J J W ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Discontinuous Galerkin finite element methods; Wet chemical etching

Indexed keywords

CONSERVATIVE DISCRETIZATION; CONVECTION DIFFUSION PROBLEMS; DIFFUSION-CONTROLLED; DIFFUSION-CONTROLLED REGIME; DISCONTINUOUS GALERKIN FINITE-ELEMENT METHOD; DISCONTINUOUS GALERKIN METHODS; NAVIER STOKES SIMULATION; WET-CHEMICAL ETCHING;

COMPUTATIONAL FLUID DYNAMICS; COMPUTATIONAL METHODS; MICROSTRUCTURE; WET ETCHING;

GALERKIN METHODS;

EID: 84893433913     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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