UHF quartz MEMS oscillators for dynamics-based system enhancements

2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013

Volumn , Issue , 2013, Pages 1-8

  Kubena, R L ^a   Kirby, D J ^a   Yong, Yook Kong ^b   Chang, D T ^a   Stratton, F P ^a   Nguyen, H D ^a   Joyce, R J ^a   Perahia, R ^a   Moyer, H P ^a   Nagele, R G ^a  

^a Hughes Aircraft Co   (United States)

^b RUTGERS UNIVERSITY   (United States)

Author keywords

duffing; force rebalance; frequency locking; nonlinear operation; ovenization; phase noise; Quartz MEMS; Si Disk Resonator Gyro; vibration compensation

Indexed keywords

DISK RESONATOR; DUFFING; FORCE REBALANCE; FREQUENCY LOCKING; NONLINEAR OPERATION; OVENIZATION; VIBRATION COMPENSATION;

QUARTZ; SILICON; SILICON WAFERS; WAFER BONDING;

PHASE NOISE;

EID: 84893337184     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EFTF-IFC.2013.6702066     Document Type: Conference Paper

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