The focused ion beam instrument

Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

Volumn , Issue , 2005, Pages 1-12

  Stevie, F A ^a   Giannuzzi, L A ^b   Prenitzer, B I ^c  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b Thermo Fisher Scientific   (United States)

^c NanoSpective   (United States)

Author keywords

FIB; Focused ion beam; Ga; Liquid metal ion source; LMIS

Indexed keywords

EID: 84892239693     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/0-387-23313-X_1     Document Type: Chapter

References (2)

1. Orloff J, Handbook of Charged Particle Optics, CRC Press, Boca Raton (1997)
2. Orloff J, Utlaut M, and Swanson L, High Resolution Focused Ion Beams: FIB and Its Applications, Kluwer Academic/Plenum Publishers, NY (2003)