The membrane micro emboss (MeME) process for fabricating 3-D microfluidic device formed from thin polymer membrane

Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Volumn , Issue , 2006, Pages 693-695

  Ikeuchi, Masashi ^a   Ikuta, Koji ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Emboss; Fabrication; Mass transfer; Membrane; Polymer

Indexed keywords

CHEMICAL ANALYSIS; FABRICATION; MASS TRANSFER; MEMBRANES; POLYMERS;

EMBOSS; MASS AND HEAT TRANSFERS; MICRO-FABRICATION TECHNIQUES; MICRO-FLUIDIC DEVICES; MICROCHANNEL WALLS; NEW APPLICATIONS; THIN MEMBRANE STRUCTURE; THIN POLYMER MEMBRANE;

FLUIDIC DEVICES;

EID: 84891941977     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. K. Ikuta and K. Hirowatari, Real three dimensional micro fabrication using stereolithography and metal molding, Proc. of MEMS'93, pp.42-47, 1993