Hybrid inorganic-organic superlattice structures with atomic layer deposition/molecular layer deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 32, Issue 1, 2014, Pages

  Tynell, Tommi ^a   Yamauchi, Hisao ^a   Karppinen, Maarit ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

HYBRID INORGANIC-ORGANIC; MOLECULAR LAYER DEPOSITIONS (MLD); SEEBECK COEFFICIENT MEASUREMENT; SMALL CONCENTRATION; SUPER-LATTICE STRUCTURES; SUPERLATTICE FORMATION; THERMOELECTRIC PROPERTIES; X RAY REFLECTIVITY;

CARRIER CONCENTRATION; DEPOSITION; ELECTRIC PROPERTIES; ZINC OXIDE;

ATOMIC LAYER DEPOSITION;

EID: 84891783515     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.4831751     Document Type: Article

References (23)

1. H. K. Schmidt, Macromol. Symp. 101, 333 (1996). 10.1002/masy.19961010138
2. S.-J. Cho, I.-S. Bae, H.-D. Jeong, and J.-H. Boo, Appl. Surf. Sci. 254, 7817 (2008). 10.1016/j.apsusc.2008.02.095
3. S. Jeong, W.-H. Jang, and J. Moon, Thin Solid Films 466, 204 (2004). 10.1016/j.tsf.2004.01.118
4. A. A. Dameron, D. Seghete, B. B. Burton, S. D. Davidson, A. S. Cavanagh, J. A. Bertrand, and S. M. George, Chem. Mater. 20, 3315 (2008). 10.1021/cm7032977
5. S. M. George, B. Yoon, and A. A. Dameron, Acc. Chem. Res. 42, 498 (2009). 10.1021/ar800105q
6. S. George, A. Dameron, Y. Du, N. M. Adamczyk, and S. Davidson, ECS Trans. 11, 81 (2007). 10.1149/1.2779072
7. B. H. Lee, M. K. Ryu, S.-Y. Choi, K.-H. Lee, S. Im, and M. M. Sung, J. Am. Chem. Soc. 129, 16034 (2007). 10.1021/ja075664o
8. B. Yoon, D. Seghete, A. S. Cavanagh, and S. M. George, Chem. Mater. 21, 5365 (2009). 10.1021/cm9013267
9. Q. Peng, B. Gong, R. M. VanGundy, and G. N. Parsons, Chem. Mater. 21, 820 (2009). 10.1021/cm8020403
10. B. Yoon, J. L. O'Patchen, D. Seghete, A. S. Cavanagh, and S. M. George, Chem. Vap. Deposition 15, 112 (2009). 10.1002/cvde.200806756
11. A. Sood, P. Sundberg, J. Malm, and M. Karppinen, Appl. Surf. Sci. 257, 6435 (2011). 10.1016/j.apsusc.2011.02.022
12. B. H. Lee, B. Yoon, V. R. Anderson, and S. M. George, J. Phys. Chem. C 116, 3250 (2012). 10.1021/jp209003h
13. L. Ghazaryan, E.-B. Kley, A. Tünnermann, and A. V. Szeghalmi, J. Vac. Sci. Technol. A 31, 01A149 (2013). 10.1116/1.4773296
14. P. Sundberg, A. Sood, X. Liu, L.-S. Johansson, and M. Karppinen, Dalton Trans. 41, 10731 (2012). 10.1039/c2dt31026k
15. A. I. Abdulagatov, R. A. Hall, J. L. Sutherland, B. H. Lee, A. S. Cavanagh, and S. M. George, Chem. Mater. 24, 2854 (2012). 10.1021/cm300162v
16. A. Sood, P. Sundberg, and M. Karppinen, Dalton Trans. 42, 3869 (2013). 10.1039/c2dt32630b
17. K.-H. Yoon, K.-S. Han, and M.-M. Sung, Nanoscale Res. Lett. 7, 71 (2012). 10.1186/1556-276X-7-71
18. R. Triboulet and J. Perrière, Prog. Cryst. Growth Charact. Mater. 47, 65 (2003). 10.1016/j.pcrysgrow.2005.01.003 (Pubitemid 40690778)
19. G. Luka, M. Godlewski, E. Guziewicz, P. Stakhira, V. Cherpak, and D. Vlynyuk, Semicond. Sci. Technol. 27, 074006 (2012). 10.1088/0268-1242/27/7/ 074006
20. B. Yoon, B. H. Lee, and S. M. George, J. Phys. Chem. C 116, 24784 (2012). 10.1021/jp3057477
21. J. O. Sofo and G. D. Mahan, Appl. Phys. Lett. 65, 2690 (1994). 10.1063/1.112607
22. R. Venkatasubramanian, E. Siivola, T. Colpitts, and B. O'Quinn, Nature 413, 597 (2001). 10.1038/35098012 (Pubitemid 32964053)
23. J. Carrete, N. Mingo, G. Tian, H. Ågren, A. Baev, and P. N. Prasad, J. Phys. Chem. C 116, 10881 (2012). 10.1021/jp3025039