A SOI-CMOS compatible smart yarn technology

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Volumn , Issue , 2013, Pages 147-150

  Tu, Hongen ^a   Xu, Yong ^a  

^a Wayne State University   (United States)

Author keywords

Intelligent Textiles; Parylene; PDMS; Smart Yarn; SOI CMOS

Indexed keywords

CMOS CIRCUITS; INTELLIGENT TEXTILES; PARYLENE COATINGS; PARYLENES; PDMS; SILICON ETCHING; SILICON-BASED SENSORS; SOI-CMOS;

ACTUATORS; CMOS INTEGRATED CIRCUITS; MICROCHANNELS; MICROSYSTEMS; SILICON; SOLID-STATE SENSORS; TEXTILES; WOOL;

YARN;

EID: 84891719773     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Transducers.2013.6626723     Document Type: Conference Paper

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