Fabrication and characterization of polycrystalline BaSi2 by RF sputtering

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 10, Issue 12, 2013, Pages 1759-1761

  Latiff, Nurul Amal Abdul ^a   Yoneyama, Takahiro ^a   Shibutami, Tetsuo ^b   Matsumaru, Keitaro ^b   Toko, Kaoru ^a   Suemasu, Takashi ^a,c  

^a UNIVERSITY OF TSUKUBA   (Japan)

^b TOSOH CORPORATION   (Japan)

^c JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Barium di silicide; RF sputtering; Semiconductor device; Solar cell

Indexed keywords

ABSORPTION EDGES; FABRICATION AND CHARACTERIZATIONS; GLASS SUBSTRATES; LONG WAVELENGTH; POLYCRYSTALLINE; RF-SPUTTERING; TRANSMISSION SPECTRUMS;

REFRACTIVE INDEX; SEMICONDUCTOR DEVICES; SILICIDES; SOLAR CELLS; SUBSTRATES;

ABSORPTION SPECTROSCOPY;

EID: 84890786022     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.201300333     Document Type: Article

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