3-D integration of silicon nitride on silicon-on-insulator platform

CLEO: Science and Innovations, CLEO_SI 2012

Volumn , Issue , 2012, Pages

  Li, Qing ^a   Eftekhar, Ali A ^a   Atabaki, Amir H ^a   Adibi, Ali ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATION; NITRIDES; SILICON NITRIDE; SILICON ON INSULATOR TECHNOLOGY; THREE DIMENSIONAL INTEGRATED CIRCUITS;

3-D INTEGRATION; DEVICE PERFORMANCE; HIGH-Q RESONATORS; SILICON-ON-INSULATOR PLATFORMS; VERTICAL INTEGRATION;

SILICON PHOTONICS;

EID: 84890740966     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1364/cleo_si.2012.cm3a.5     Document Type: Conference Paper

References (1)

1. C M. C. Tien, J. F. Bauters, M. M. R. Heck, D. J. Blumenthal, and J. E. Bowers, "Ultra-low loss Si3N4 waveguides with low nonlinearity and high power handling capability," Opt. Express 18, 23562 (2010).