Graphene and thin-film semiconductor heterojunction transistors integrated on wafer scale for low-power electronics

Nano Letters

Volumn 13, Issue 12, 2013, Pages 5967-5971

  Heo, Jinseong ^a   Byun, Kyung Eun ^a   Lee, Jaeho ^a   Chung, Hyun Jong ^a,b   Jeon, Sanghun ^a,c   Park, Seongjun ^a   Hwang, Sungwoo ^a  

^a SAMSUNG Electronics   (South Korea)

^b Konkuk University   (South Korea)

^c Korea University   (South Korea)

Author keywords

Graphene; heterojunction transistor; low power electronics; thin film semiconductor; wafer scale integration

Indexed keywords

AMBIENT CONDITIONS; ASYMMETRIC-JUNCTION; ELECTRONIC DEVICE; HETEROJUNCTION TRANSISTORS; LOW-POWER LOGIC; SEMICONDUCTOR HETEROJUNCTIONS; TECHNOLOGY PLATFORMS; WAFER-SCALE INTEGRATION;

FIELD EFFECT TRANSISTORS; GERMANIUM; GRAPHENE; HETEROJUNCTIONS; METALS; POWER ELECTRONICS; WSI CIRCUITS;

SILICON WAFERS;

GRAPHITE;

ARTICLE; CHEMISTRY; ELECTRONICS; SEMICONDUCTOR;

ELECTRONICS; GRAPHITE; SEMICONDUCTORS; TRANSISTORS, ELECTRONIC;

EID: 84890317131     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl403142v     Document Type: Article

References (28)

1. Novoselov, K. S.; Geim, A. K.; Morozov, S. V.; Jiang, D.; Zhang, Y.; Dubonos, S. V.; Grigorieva, I. V.; Firsov, A. A. Science 2004, 306 (5696) 666-669
2. Zhang, Y.; Tan, Y.-W.; Stormer, H. L.; Kim, P. Nature 2005, 438 (7065) 201-204
3. Lin, Y.-M.; Dimitrakopoulos, C.; Jenkins, K. A.; Farmer, D. B.; Chiu, H.-Y.; Grill, A.; Avouris, P. Science 2010, 327 (5966) 662
4. Schwierz, F. Nat. Nanotechnol. 2010, 5 (7) 487-496
5. Kim, K.; Choi, J.-Y.; Kim, T.; Cho, S.-H.; Chung, H.-J. Nature 2011, 479 (7373) 338-344
6. Yang, H.; Heo, J.; Park, S.; Song, H. J.; Seo, D. H.; Byun, K.-E.; Kim, P.; Yoo, I.; Chung, H.-J.; Kim, K. Science 2012, 336 (6085) 1140-1143
7. Vaziri, S.; Lupina, G.; Henkel, C.; Smith, A. D.; Östling, M.; Dabrowski, J.; Lippert, G.; Mehr, W.; Lemme, M. C. Nano Lett. 2013, 13 (4) 1435-1439
8. Britnell, L.; Gorbachev, R. V.; Jalil, R.; Belle, B. D.; Schedin, F.; Mishchenko, A.; Georgiou, T.; Katsnelson, M. I.; Eaves, L.; Morozov, S. V.; Peres, N. M. R.; Leist, J.; Geim, A. K.; Novoselov, K. S.; Ponomarenko, L. A. Science 2012, 335 (6071) 947-950
9. Georgiou, T.; Jalil, R.; Belle, B. D.; Britnell, L.; Gorbachev, R. V.; Morozov, S. V.; Kim, Y.-J.; Gholinia, A.; Haigh, S. J.; Makarovsky, O.; Eaves, L.; Ponomarenko, L. A.; Geim, A. K.; Novoselov, K. S.; Mishchenko, A. Nat. Nanotechnol. 2013, 8 (2) 100-103
10. Yu, W. J.; Li, Z.; Zhou, H.; Chen, Y.; Wang, Y.; Huang, Y.; Duan, X. Nat. Mater. 2013, 12 (3) 246-252
11. Lundstrom, M. Science 2003, 299 (5604) 210-211
12. International Technology Roadmap for Semiconductors; Semiconductor Industry Association: San Jose, CA, 2012.
13. Nomura, K.; Ohta, H.; Takagi, A.; Kamiya, T.; Hirano, M.; Hosono, H. Nature 2004, 432 (7016) 488-492
14. Jeon, S.; Ahn, S.-E.; Song, I.; Kim, C. J.; Chung, U. I.; Lee, E.; Yoo, I.; Nathan, A.; Lee, S.; Robertson, J.; Kim, K. Nat. Mater. 2012, 11 (4) 301-305
15. Fortunato, E.; Barquinha, P.; Martins, R. Adv. Mater. 2012, 24 (22) 2945-2986
16. Jaegoo, L.; Cha, J. J.; Naoi, T.; Muller, D. A.; van Dover, R. B.; Shaw, J. T.; Kan, E. C. Device Res. Conf. 2010, 259-260
17. Pillarisetty, R. Nature 2011, 479 (7373) 324-328
18. Heo, J.; Chung, H. J.; Lee, S.-H.; Yang, H.; Seo, D. H.; Shin, J. K.; Chung, U. I.; Seo, S.; Hwang, E. H.; Das Sarma, S. Phys. Rev. B. 2011, 84 (3) 035421
19. Banerjee, S.; Richardson, W.; Coleman, J.; Chatterjee, A. IEEE Electron Device Lett. 1987, 8 (8) 347-349
20. Hansch, W.; Fink, C.; Schulze, J.; Eisele, I. Thin Solid Films 2000, 369 (1-2) 387-389
21. Ionescu, A. M.; Riel, H. Nature 2011, 479 (7373) 329-337
22. CRC Handbook of Chemistry and Physics, 86 th ed.; CRC Press: Boca Raton, FL, 2005.
23. Barquinha, P.; Vila, A. M.; Goncalves, G.; Pereira, L.; Martins, R.; Morante, J. R.; Fortunato, E. IEEE Trans. Electron Devices 2008, 55 (4) 954-960
24. Yim, J.-R.; Jung, S.-Y.; Yeon, H.-W.; Kwon, J.-Y.; Lee, Y.-J.; Lee, J.-H.; Joo, Y.-C. Jpn. J. Appl. Phys. 2012, 51 (1) 011401
25. Nomura, K.; Kamiya, T.; Ohta, H.; Uruga, T.; Hirano, M.; Hosono, H. Phys. Rev. B. 2007, 75 (3) 035212
26. Hsieh, H.-H.; Kamiya, T.; Nomura, K.; Hosono, H.; Wu, C.-C. Appl. Phys. Lett. 2008, 92 (13) 133503-3
27. Jeon, K.; Kim, C.; Song, I.; Park, J.; Kim, S.; Kim, S.; Park, Y.; Park, J.-H.; Lee, S.; Kim, D. M.; Kim, D. H. Appl. Phys. Lett. 2008, 93 (18) 182102-3
28. Bandaru, P. R.; Sahni, S.; Yablonovitch, E.; Liu, J.; Kim, H. J.; Xie, Y. H. Mater. Sci. Eng., B 2004, 113 (1) 79-84