Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 13, Issue 1, 2014, Pages

  Hofmann, Ulrich ^a   Aikio, Mika ^b   Janes, Joachim ^a   Senger, Frank ^a   Stenchly, Vanessa ^a   Hagge, Juergen ^a   Quenzer, Hans Joachim ^a   Weiss, Manfred ^a   Von Wantoch, Thomas ^a   Mallas, Christian ^a   Wagner, Bernhard ^a   Benecke, Wolfgang ^a  

^a FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

lidar; microelectromechanical systems; mirrors; opticaldevices; scanners; scanning

Indexed keywords

ACCIDENTS; AUTOMOBILE MANUFACTURE; ELECTROMECHANICAL DEVICES; ELECTROSTATIC ACTUATORS; LASER APPLICATIONS; MEMS; NATURAL FREQUENCIES; OPTICAL DEVICES; OPTICAL RADAR; SCANNING; TRACKING (POSITION);

ADVANCED DRIVER ASSISTANT SYSTEMS; AUTOMOTIVE VEHICLE; ENVIRONMENTAL PERCEPTIONS; FREQUENCY SPLITTINGS; ORTHOGONAL AXES; SCANNERS; VERTICAL COMB DRIVE; WAFER LEVEL VACUUM PACKAGING;

MIRRORS;

EID: 84890034391     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.JMM.13.1.011103     Document Type: Article

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