Holographic microscope for measuring disjlacements of vibrating microbeams using time-average holography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2860, Issue , 1996, Pages 111-121

  Brown, Gordon C ^a   Pryputniewicz, Ryszard J ^a  

^a Worcester Polytechnic Institute   (United States)

Author keywords

Electro optic holography (EOH); EOHM; Hybrid methods; MEMS; Microscopic holography; Microsensors

Indexed keywords

ELECTROMECHANICAL DEVICES; HOLOGRAMS; LASER INTERFEROMETRY; MEMS; MICROSCOPES; MICROSENSORS;

ACTUATORS AND SENSORS; DYNAMIC CHARACTERISTICS; EOHM; HYBRID METHOD; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROSCOPIC HOLOGRAPHIES; OBJECT DISPLACEMENT; SUBMICRON DIMENSION;

HOLOGRAPHIC INTERFEROMETRY;

EID: 84889546977     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.276296     Document Type: Conference Paper

References (12)

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