Low-pressure hollow-cathode glow discharge plasma for broad beam gaseous ion source

Review of Scientific Instruments

Volumn 69, Issue 2, 1998, Pages 853-855

  Oks, Efim M ^a   Vizir, Alexey V ^a   Yushkov, George Yu ^a  

^a INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84889450459     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1148580     Document Type: Conference Paper

References (7)

1. Yu. P. Raizer, Physics of Gas Discharge (Moscow, Nauka, 1987) (in Russian).
2. B. Wolf, Handbook of Ion Sources (CRC, Boca Ration, FL, 1995).
3. A. T. Forrester, Large Ion Beams (Wiley, New York, 1988).
4. Charged Particle Sources with Plasma Emitter, edited by P. M. Schanin (Ekaterinburg, UIF Nauka, 1993) (in Russian).
5. E. Oks, Plasma Sources Sci. Technol. PSTEEU 4, 571 (1995).
6. E. Oks and, A. Chagin, J. Tech. Phys. JTPHDR 58, 1191 (1988).
7. A. S. Metel’, Sov. Phys. Tech. Phys. SPTPA3 29, 141 (1984).