X-ray elemental imaging in depth by combination of FE-SEM-EDS and glow discharge sputtering

ISIJ International

Volumn 53, Issue 11, 2013, Pages 1939-1942

  Onoue, Fumiya ^a   Tsuji, Kouichi ^a  

^a Osaka Prefecture University   (Japan)

Author keywords

3D elemental mapping; Elemental imaging; FE SEM; Glow discharge; SEM EDS; Sputtering

Indexed keywords

DISTRIBUTION ANALYSIS; ELEMENTAL COMPOSITIONS; ELEMENTAL MAPPING; FE-SEM; GLOW DISCHARGE SPUTTERING; NON DESTRUCTIVE; RF GLOW DISCHARGE; SEM-EDS;

ELECTRON BEAMS; SPUTTERING; THREE DIMENSIONAL;

GLOW DISCHARGES;

EID: 84889029546     PISSN: 09151559     EISSN: None     Source Type: Journal    
DOI: 10.2355/isijinternational.53.1939     Document Type: Article

References (4)

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2. R. Payling, D. G. Jones and A. Bengtson: Glow Discharge Optical Emission Spectrometry, Wiley, Chichester, (1997).
3. V. D. Scott, G. Love and S. J. B. Reed: Quantitative Electron-probe Microanalysis, 2nd ed., Ellis Horwood, NY, (1995).
4. S. J. B. Reed: Electron Microprobe Analysis, 2nd ed., Cambridge University Press, Cambridge, (1993).