Excimer laser sputtering deposition of skutterudites for thermoelectric applications.

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3550, Issue , 1998, Pages 120-128

  Durand, H A ^a   Ito, K ^a   Kataoka, I ^a  

^a Japan Aviat Electron Indust   (Japan)

Author keywords

Ablation; Cobalt antimonide; Excimer laser; Thermoelectric; Thin films

Indexed keywords

ABLATION; ANTIMONY COMPOUNDS; COBALT COMPOUNDS; EXCIMER LASERS; FLUORINE COMPOUNDS; PALLADIUM COMPOUNDS; PHOSPHORUS COMPOUNDS; RUTHENIUM COMPOUNDS; SKUTTERUDITES; SPUTTERING; THERMOELECTRIC EQUIPMENT; THERMOELECTRICITY; THIN FILMS;

BACKGROUND PRESSURE; COBALT ANTIMONIDE; CRYSTALLINE STRUCTURE; DEPOSITION PARAMETERS; SUBSTRATE TEMPERATURE; THERMOELECTRIC; THERMOELECTRIC APPLICATION; THERMOELECTRIC PROPERTIES;

LASER MATERIALS PROCESSING;

EID: 84887444953     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.317938     Document Type: Conference Paper

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