Bulk acoustic wave devices - Why, how, and where they are going

2007 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2007

Volumn , Issue , 2007, Pages 15-18

  Mahon, Steven ^a   Aigner, Robert ^a  

^a TRIQUINT SEMICONDUCTOR   (United States)

Author keywords

Baw; Bulk acoustic wave; Microwave filters

Indexed keywords

BAW; BULK ACOUSTIC WAVES; CERAMIC FILTERS; HIGHER FREQUENCIES; INDUSTRIAL MARKETS; SIZE REDUCTIONS; SURFACE ACOUSTIC WAVES; WIRELESS APPLICATION;

ACOUSTIC SURFACE WAVE DEVICES; COMMERCE; MICROWAVE FILTERS; WIRELESS TELECOMMUNICATION SYSTEMS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 84887416036     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. K.M. Lakin, Thin Film Resonator Technology, IEEE 2003 FCS-EFTE A-4.
2. M.A Dubois, Thin Film Bulk Acoustic Resonators: A Technology Overview.
3. W. Mueller, A Brief Overview of FBAR technology. http://www.avagotech. com/.
4. K.M Lakin et. al High Frequency Stacked Crystal Filters for GPS and Wide Bandwidth Applications. IEEE 2001 Ultrasonics Symposium, Paper 3E-6.
5. G. Bouche, et. al. System Integration of BAW Filters, MEMSWAVE 04.