Green gallium arsenide (GaAs) substrate manufacturing

2012 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2012

Volumn , Issue , 2012, Pages

  Eichler, Stefan ^a  

^a FREIBERGER COMPOUND MATERIALS GMBH   (Germany)

Author keywords

Green manufacturing; Pollution prevention; Recycling; Waste minimization; Water consumption

Indexed keywords

ENVIRONMENTAL FOOTPRINTS; GAAS SUBSTRATES; GREEN MANUFACTURING; IMPACT ON THE ENVIRONMENT; MANUFACTURING PROCESS; POLLUTION PREVENTION; WASTE MINIMIZATION; WATER CONSUMPTION;

CONSERVATION; GALLIUM ARSENIDE; MANUFACTURE; RECYCLING; SEMICONDUCTOR DEVICE MANUFACTURE; WATER POLLUTION; WATER SUPPLY;

SUBSTRATES;

EID: 84887344419     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. J. Stenzenberger et al., Journal of Crystal Growth 250 (2003) 57-61
2. E. Burke, Waste Minimization, Pollution Prevention and Resource recovery at a GaAs Manufactuer, 2010 CS MANTECH Technical Digest, May 2010.