Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time

Proceedings - IEEE International Conference on Robotics and Automation

Volumn , Issue , 2013, Pages 3555-3560

  Zhu, Qinghua ^a   Wu, Naiqi ^a   Qiao, Yan ^a   Zhou, Mengchu ^b  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b Department of Computer Science and Technology   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CLUSTER TOOL; MINIMUM CYCLE TIME; MULTI-CLUSTER TOOLS; OPTIMALITY CONDITIONS; PERIODIC SCHEDULE; PETRI NET MODELS; SCHEDULING PROBLEM; WAITING TIME;

ALGORITHMS; OPTIMIZATION; PETRI NETS; ROBOTS; SCHEDULING; TOOLS;

ROBOTICS;

EID: 84887269835     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICRA.2013.6631075     Document Type: Conference Paper

References (13)

1. T.-E.Lee, H.-Y.Lee, and Y.-H.Shin, "Workload balancing and scheduling of a single-armed cluster tool, " in Proceedings of the 5th APIEMS Conference, Gold Coast, Australia, 1-15, 2004.
2. M.-J.Lopez and S.-C.Wood, "Systems of multiple cluster tools-configuration, reliability, and performance, " IEEE Transactions on Semiconductor Manufacturing, vol.16, no.2, 170-178, 2003.
3. D.Jevtic, "Method and Apparatus for Managing Scheduling a Multiple Cluster Tool, " European Patent.vol.1, 132, 792(A2), 2001.
4. S.W.Ding, J.G.Yi, and M.T.Zhang, "Multicluster Tools Scheduling: an Integrated Event Graph and Network Model Approach, " IEEE Trans.Semiconduct.Manufact., vol.19, no.3, pp.339-351, 2006.
5. J.G.Yi, S.W.Ding, D.Z.Song, and M.T.Zhang, "Steady-State Throughput and Scheduling Analysis of Multi-Cluster Tools for Semiconductor Manufacturing: A Decomposition Approach, " IEEE Trans.Automat.Sci.Eng., vol.5, no.2, pp.321-336, 2008.
6. W.K.Chan, J.G.Yi, and S.W.Ding, "Optimal Scheduling of Multicluster Tools with Constant Robot Moving Times, Part I: Two-Cluster Analysis, " IEEE Trans.Automat.Sci.Eng., vol.8, pp.5-16, 2011.
7. W.K.Chan, J.G.Yi, S.W.Ding, and D.Z.Song, "Optimal Scheduling of Multicluster Tools with Constant Robot Moving Times, Part II: Tree-Like Topology Configurations, " IEEE Trans.Automat.Sci.Eng., vol.8, pp.17-28, 2011.
8. N.Q.Wu, C.B.Chu, F.Chu, and M.C.Zhou, "A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints, " IEEE Trans.Semiconduct.Manufact., vol.21, no.2, pp.224-237, 2008.
9. N.Q.Wu and M.Zhou, "Analysis of wafer sojourn time in dual-arm cluster tools with residency time constraint and activity time variation, " IEEE Trans.Semiconduct.Manufact., vol.23, no.1, pp.53-64, 2010.
10. M.C.Zhou and M.D.Jeng, "Modeling, Analysis, Simulation, Scheduling, and Control of Semiconductor Manufacturing Systems: A Petri Net Approach, " IEEE Trans.Semiconduct.Manufact., vol.11, no.3, pp.333-357, 1998.
11. Z.W.Li and M.C.Zhou, Deadlock Resolution in Automated Manufacturing Systems: A Novel Petri Net Approach, Springer, New York, 2009.
12. N.Q.Wu and M.C.Zhou, System Modeling and Control with Resource-Oriented Petri Nets, CRC Press, New York, 2010.
13. M.Dawande, C.Sriskandarajah, and S.Sethi, "On throughtput maximization in constant travel-time robotic cells, " Manuf.Serv.Oper. Manage., vol.4, no.4, pp.296-312, 2002.