High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory

Journal of the European Optical Society

Volumn 1, Issue , 2006, Pages

  van Haver, S ^a   Braat, J J M ^a   Dirksen, P ^b   Janssen, A J E M ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Focusing; Phase retrieval; Vectorial theory

Indexed keywords

ABERRATIONS; DIFFRACTION; FOCUSING; NUMERICAL METHODS; VECTORS;

ABERRATION RETRIEVALS; DIFFRACTION ANALYSIS; HIGH NUMERICAL APERTURES; PHASE RETRIEVAL; RECONSTRUCTION OPERATIONS; TRANSMISSION VARIATION; VECTOR DIFFRACTION THEORY; VECTORIAL THEORIES;

OPTICAL SYSTEMS;

EID: 84887150328     PISSN: None     EISSN: 19902573     Source Type: Journal    
DOI: 10.2971/jeos.2006.06004     Document Type: Article

References (14)

1. D. Malacara, Optical Shop Testing (2nd edition, Wiley, Hoboken NJ, USA, 1992).
2. R. W. Gerchberg and W. O. Saxton, "Phase determination from image and diffraction plane pictures in the electron-microscope, " Optik 34, 275 (1971).
3. R. W. Gerchberg and W. O. Saxton, "Practical algorithm for determination of phase from image and diffraction pictures, " Optik 35, 237 (1972).
4. B. R. Frieden, "Restoring with maximum likelihood and maximum entropy, " J. Opt. Soc. Am. 62, 511 (1972).
5. J. R. Fienup, "Phase retrieval algorithms-a comparison, " Appl. Opt. 21, 2758-2769 (1982).
6. A. J. E. M. Janssen, "Extended Nijboer-Zernike approach for the computation of optical point-spread functions, " J. Opt. Soc. Am. A 19, 849-857 (2002).
7. A. J. E. M. Janssen, J. J. M. Braat, and P. Dirksen "On the computation of the Nijboer-Zernike aberration integrals at arbitrary defocus, " J. Mod. Opt. 51, 687-703 (2004).
8. J. J. M. Braat, P. Dirksen, and A. J. E. M. Janssen, "Assessment of an extended Nijboer-Zernike approach for the computation of optical point-spread functions, " J. Opt. Soc. Am. A 19, 858-870 (2002).
9. P. Dirksen, J. J. M. Braat, A. J. E. M. Janssen, and C. Juffermans, "Aberration retrieval using the extended Nijboer-Zernike approach, " J. Microlithogr. Microfabr. Microsyst. 2, 61-68 (2003).
10. P. Dirksen, J. J. M. Braat, A. J. E. M. Janssen, and A. Leeuwestein, " Aberration retrieval for high-NA optical systems using the extended NIjboer-Zernike theory, " Proc. SPIE 5754, 262-273 (2005).
11. J. J. M. Braat, P. Dirksen, A. J. E. M. Janssen, and A.S. van de Nes, "Extended Nijboer-Zernike representation of the vector field in the focal region of an aberrated high-aperture optical system, " J. Opt. Soc. Am. A 20, 2281-2292 (2003).
12. J. J. M. Braat, P. Dirksen, A. J. E. M. Janssen, S. van Haver, and A.S. van de Nes, "Extended Nijboer-Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system, " J. Opt. Soc. Am. A 22, 2635-2650 (2005).
13. B. Richards and E. Wolf, "Electromagnetic diffraction in optical systems II. Structure of the image field in an aplanatic system, " Proc. Roy. Soc. A 253, 358-379 (1959).
14. C. van der Avoort, J.J.M. Braat, P. Dirksen, and A.J.E.M. Janssen, "Aberration retrieval from the intensity point-spread function in the focal region using the extended Nijboer-Zernike approach", J. Mod. Opt. 52, pp. 1695-1728 (2005).