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Volumn 52, Issue 10 PART2, 2013, Pages

Tb0:3Dy0:7Fe1:9/PbZr0:52Ti 0:48O3 micro-bridge on sinx thin film for low frequency magnetic sensing applications

(12) Lee, Dong Gun a Han, Jun Hyun b Lee, Junwoo a Choi, Wook a Yoo, Yong Kyung a Kim, Jinseok c Hwang, Kyo Seon c Kim, Tae Song c Chun, Dong Won c Kim, Yu Chan c Lee, Kyu Hyoung d Lee, Jeong Hoon a

a Kwangwoon University (South Korea)

b Chungnam National University (South Korea)

c Korea Institute of Science and Technology (South Korea)

d SAMSUNG Electronics (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DC MAGNETIC FIELD; ELASTIC COUPLING; LIMIT OF DETECTION; LINEARLY PROPORTIONAL; MAGNETIC FIELD VARIATIONS; MAGNETIC SENSING; MULTI-LAYERED STRUCTURE; PIEZOELECTRIC THIN FILMS;

COMPOSITE MICROMECHANICS; MAGNETIC FIELDS; SILICON NITRIDE;

THIN FILMS;

EID: 84887030678 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.7567/JJAP.52.10MC10 Document Type: Conference Paper

Times cited : (2)

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