2-GHz Si power MOSFET technology

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1997, Pages 51-54

  Yoshida, Isao ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

METAL SILICIDE GATE/SILICON STRUCTURE;

GATES (TRANSISTOR); SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES;

MOSFET DEVICES;

EID: 84886448165     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)