Silicon double-island single-electron device

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1997, Pages 163-166

  Fujiwara, Akira ^a   Takahashi, Yasuo ^a   Yamazaki, Kenji ^a   Namatsu, Hideo ^a   Nagase, Masao ^a   Kurihara, Kenji ^a   Murase, Katsumi ^a  

^a NTT Basic Research Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

SINGLE ELECTRON DEVICES (SED);

ELECTRIC CURRENTS; ION IMPLANTATION; OXIDATION; SILICON ON INSULATOR TECHNOLOGY;

SILICON WAFERS;

EID: 84886448149     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)