New clustering model for runaway boron pile-up effect

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1997, Pages 505-508

  Orlowski, Marius ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

RUNAWAY BORON PILE UP EFFECTS;

ANNEALING; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DOPING;

SEMICONDUCTING BORON;

EID: 84886448128     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)