Sputtered thin film boron nitride cold emitters on metal substrates

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1997, Pages 733-736

  Pryor, Roger W ^a   Li, Li,hua ^a   Busta, Heinz H ^a  

^a WAYNE STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BEADBLASTED-INDUCED SURFACE PROTRUSIONS;

BORON COMPOUNDS; ELECTRODES; ELECTRON EMISSION; INTERFACES (MATERIALS); INTERFACIAL ENERGY; MAGNETRON SPUTTERING; MOLYBDENUM; NIOBIUM; SEMICONDUCTOR DOPING; SUBSTRATES;

THIN FILMS;

EID: 84886448093     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)