Automated extraction of capacitances and electrostatic forces in MEMS and ULSI interconnects from the mask layout

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1997, Pages 129-132

  Bachtold, M ^a   Taschini, S ^a   Korvink, J G ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATED ELECTROSTATIC PARAMETER EXTRACTION;

CAPACITANCE; COMPUTER SIMULATION; ELECTROSTATICS; INTEGRATED CIRCUIT LAYOUT; MASKS; ULSI CIRCUITS;

MICROELECTROMECHANICAL DEVICES;

EID: 84886448077     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)