Practical applications of 2-D Optical Proximity Corrections for enhanced performance of 0.25 μm random logic devices

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1997, Pages 483-486

  Chuang, H ^a   Gilbert, P ^a   Grobman, W ^a   Kling, M ^a   Lucas, K ^a   Reich, A ^a   Roman, B ^a   Travis, E ^a   Tsui, P ^a   Vuong, T ^a   West, J ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

TWO DIMENSIONAL OPTICAL PROXIMITY CORRECTION (OPC) ALGORITHMS;

ALGORITHMS; DATA REDUCTION; DISTANCE MEASUREMENT; FORMAL LOGIC; LOGIC DEVICES; RANDOM PROCESSES;

PHOTOLITHOGRAPHY;

EID: 84886448016     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)