Process charging in ULSI: Mechanisms, impact and solutions

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1997, Pages 433-436

  McVittie, James P ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BULK TRAPPED CHARGE EFFECTS; PLASMA CHARGING;

ASPECT RATIO; ELECTRIC CHARGE; ELECTRIC CURRENTS; OXIDES; PLASMA APPLICATIONS; PLASMA DENSITY;

ULSI CIRCUITS;

EID: 84886448004     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)