Optical property of random inverted-pyramid textures on Si surface by etching with N-fluoropyridinium salts

ECS Transactions

Volumn 50, Issue 51, 2013, Pages 109-114

  Otani, Masaki ^a   Uchikoshi, Junichi ^a   Tsukamoto, Kentaro ^a   Hirano, Toshinori ^a   Nagai, Takabumi ^b   Adachi, Kenji ^b   Kawai, Kentaro ^a   Arima, Kenta ^a   Morita, Mizuho ^a  

^a OSAKA UNIVERSITY   (Japan)

^b DAIKIN INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; SALTS;

CONSTANT TEMPERATURE; ETCHING DEPTH; LIGHT INTENSITY; PHOTO-ETCHING; SI SURFACES;

OPTICAL PROPERTIES;

EID: 84885712432     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/05051.0109ecst     Document Type: Conference Paper

References (5)

1. E. Vazsonyi, et al., Sol. Energy Mater. Sol. Cells., 57, 179 (1999).
2. T. Juvonen, et al., Physica Scripta., T101, 96 (2002).
3. T. Umemoto, et al., J. Am. Chem. Soc., 112, 8563 (1990).
4. T. Umemoto, Tetrahedron Lett., 27, 4465 (1986)
5. K. Tsukamoto, et al., Electrochem. Solid-State Lett., 13, D80 (2010).