Investigation of accelerated neutral atom beams created from gas cluster ion beams

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 307, Issue , 2013, Pages 281-289

  Kirkpatrick, A ^a   Kirkpatrick, S ^a   Walsh, M ^a   Chau, S ^a   Mack, M ^a   Harrison, S ^a   Svrluga, R ^a   Khoury, J ^a  

^a Exogenesis Corporation   (United States)

Author keywords

Accelerated neutral atom beam; ANAB; Gas cluster ion beam; GCIB

Indexed keywords

ENERGY TRANSFER; GASES; ION BEAM ASSISTED DEPOSITION; ION BEAMS; IONIZATION; IONIZATION OF GASES; IONS; SEMICONDUCTING GALLIUM COMPOUNDS;

ANAB; BIOMEDICAL DEVICES; COLLIMATED BEAMS; ELECTROSTATIC DEFLECTORS; GAS CLUSTER ION BEAMS; GAS CLUSTER IONS; GCIB; NEUTRAL ATOM BEAM;

ATOMS;

EID: 84885308200     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2012.11.084     Document Type: Article

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