Measurements of the refractive indices and thermo-optic coefficients of Si3N4 and SiOx using microring resonances

Optics Letters

Volumn 38, Issue 19, 2013, Pages 3878-3881

  Arbabi, Amir ^a   Goddard, Lynford L ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC SIMULATION; MATERIAL PARAMETER; MICRORING RESONANCE; MICRORING RESONATOR; SINGLE WAVELENGTH; SINGULAR VALUE DECOMPOSITION METHOD; TEMPERATURE SENSITIVITY; THERMO-OPTIC COEFFICIENTS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RESONANCE; SILICON NITRIDE; VAPORS;

REFRACTIVE INDEX;

EID: 84885032890     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.38.003878     Document Type: Article

References (14)

1. K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, Opt. Express 15, 7610 (2007).
2. Y. Ding, M. Pu, L. Liu, J. Xu, C. Peucheret, X. Zhang, D. Huang, and H. Ou, Opt. Express 19, 6462 (2011).
3. A. Arbabi and L. L. Goddard, IEEE Photon. J. 4, 574 (2012).
4. R. Ulrich and R. Torge, Appl. Opt. 12, 2901 (1973).
5. R. T. Kersten, Opt. Acta 22, 503 (1975).
6. A. Arbabi and L. L. Goddard, IEEE Photon. J. 4, 1702 (2012).
7. A. Arbabi, Y. M. Kang, C. Lu, E. Chow, and L. L. Goddard, Appl. Phys. Lett. 99, 091105 (2011).
8. Y. M. Kang, A. Arbabi, and L. L. Goddard, Opt. Express 18, 16813 (2010).
9. Y. M. Kang, A. Arbabi, and L. L. Goddard, Opt. Quantum Electron. 41, 689 (2009).
10. A. Arbabi, Y. M. Kang, and L. L. Goddard, IEEE J. Quantum Electron. 46, 1769 (2010).
11. A. Arbabi, Y. M. Kang, and L. L. Goddard, in Proceedings of 2010 Frontiers in Optics (FiO) Conf. (2010), paper FThQ3.
12. W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C: The Art of Scientific Computing (Cambridge University, 2002).
13. A. C. Hryciw, S. Y. R. D. Kekatpure, L. D. Negro, and M. L. Brongersma, Appl. Phys. Lett. 98, 041102 (2011).
14. D. B. Leviton and B. J. Frey, Proc. SPIE 6273, 62732K (2006).