A piezoelectric micropump with an integrated sensor based on space-division multiplexing

Sensors and Actuators, A: Physical

Volumn 203, Issue , 2013, Pages 29-36

  Zhang, Zhonghua ^a   Kan, Junwu ^a   Cheng, Guangming ^a   Wang, Hongyun ^a   Jiang, Yonghua ^a  

^a ZHEJIANG NORMAL UNIVERSITY   (China)

Author keywords

Micropump; Piezoelectric; Segmented electrode; Self sensing; Space division multiplexing

Indexed keywords

DIAPHRAGMS; ELECTRODES; INSTRUMENT TESTING; PIEZOELECTRICITY; PUMPS;

MICRO PUMP; PIEZOELECTRIC; SEGMENTED ELECTRODES; SELF-SENSING; SPACE DIVISION MULTIPLEXING;

SPACE DIVISION MULTIPLE ACCESS;

EID: 84884380842     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2013.08.027     Document Type: Article

References (24)

1. E. Kjeang, N. Djilali, and D. Sinton Microfluidic fuel cells: a review J. Power Sources 186 2009 353 369
2. C.Y. Lee, C.L. Chang, Y.N. Wang, and L.M. Fu Microfluidic mixing: a review Int. J. Mol. Sci. 12 2011 3263 3287
3. N.C. Tsai, and C.Y. Sue Review of MEMS-based drug delivery and dosing systems Sens. Actuators A Phys. 134 2007 555 564
4. F. Amirouche, Y. Zhou, and T. Johnson Current micropump technologies and their biomedical applications Microsys. Technol. 15 2009 647 666
5. D.J. Laser, and J.G. Santiago A review of micropumps J. Micromech. Microeng. 14 2004 R35 R64
6. B.D. Iverson, and S.V. Garimella Recent advances in microscale pumping technologies: a review and evaluation Microfluid. Nanofluid. 5 2008 145 174
7. K.S. Lee, B. Kim, and M.A. Shannon An electrostatically driven valve-less peristaltic micropump with a stepwise chamber Sens. Actuators A: Phys. 187 2012 183 189
8. Z.R. Xu, C.G. Yang, C.H. Liu, Z. Zhou, J. Fang, and J.H. Wang An osmotic micro-pump integrated on a microfluidic chip for perfusion cell culture Talanta 80 2010 1088 1093
9. J. Huang, J.H. Zhang, and S.Y. Wang Theory and experimental verification on valveless piezoelectric pump with multistage Y-shape tubes Opt. Precis. Eng. 21 2013 423 430
10. D.N.C. Nam, and K.K. Ahn Design of an IPMC diaphragm for micropump application Sens. Actuators A: Phys. 187 2012 174 182
11. H.H. Kim, J.H. Oh, J.N. Lim, K.J. Lim, and D.H. Park Design of valveless type piezoelectric pump for micro-fluid devices Proc. Chem. 1 2009 353 356
12. G.M. Cheng, P. Li, P. Zeng, J.S. Dong, and F.F. Sun Piezoelectric pump used in bionic underwater propulsion unit J. Bion. Eng. 4 2007 159 164 (Pubitemid 47513627)
13. J.W. Kan, Z.G. Yang, T.J. Peng, G.M. Cheng, and B.D. Wu Design and test of a high-performance piezoelectric micropump for drug delivery Sens. Actuators A: Phys. 121 2005 156 161
14. X. Yang, Z.Y. Zhou, H.J. Cho, and X.B. Luo Study on a PZT-actuated diaphragm pump for air supply for micro fuel cells Sens. Actuators A: Phys. 130-131 2006 531 536 (Pubitemid 44037332)
15. W.J. Spencer, W.T. Corbett, L.R. Dominguez, and B.D. Shafer An electronically controlled piezoelectric insulin pump and valves IEEE Trans. Sonic Ultrason. 25 1978 153 156
16. G.J. Liu, C.L. Shen, Z.G. Yang, X.X. Cai, and H.H. Zhang A disposable piezoelectric micropump with high performance for closed-loop insulin therapy system Sens. Actuators A: Phys. 163 2010 291 296
17. S. Böhm, B. Timmer, W. Olthuis, and P. Bergveld A closed-loop controlled electrochemically actuated micro-dosing system J. Micromech. Microeng. 10 2000 498 504 (Pubitemid 32075092)
18. N.T. Nguyen, A.H. Meng, J. Black, and R.M. White Integrated flow sensor for in situ measurement and control of acoustic streaming in flexural plate wave micropumps Sens. Actuators A: Phys. 79 2000 115 121 (Pubitemid 30548937)
19. N. Szita, R. Sutter, J. Dual, and R.A. Buser A micropipettor with integrated sensors Sens. Actuators A: Phys. 89 2001 112 118
20. J.J. Dosch, D.J. Inman, and E. Garcia A self-sensing piezoelectric actuator for collocated control J. Intell. Mater. Syst. Struct. 3 1992 166 185
21. J.S. Yang Piezoelectric transformer structural modeling - a review IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 54 2007 1154 1170
22. Z.P. Yang, L.L. Yang, X.L. Chao, R. Zhang, and Y.Q. Chen Electrical characteristics of central driving type piezoelectric transformers with different electrode distributing Sens. Actuators A: Phys. 136 2007 341 346 (Pubitemid 46590677)
23. F. Arai, K. Motoo, P.G.R. Kwon, T. Fukuda, A. Ichikawa, and T. Katsuragi Novel touch sensor with piezoelectric thin film for microbial separation Proceedings of IEEE International Conference on Robotics and Automation Taipei, Taiwan 2003 306 311
24. D. Campolo, R. Sahai, and R.S. Fearing Development of piezoelectric bending actuators with embedded piezoelectric sensors for micromechanical flapping mechanisms Proceedings of IEEE International Conference on Robotics and Automation Taipei, Taiwan 2003 3339 3346