An energy-dispersive X-ray diffraction study of the nickel-sulfide assisted growth of RuS2 thin films by reactive magnetron sputtering

Journal of Crystal Growth

Volumn 363, Issue , 2013, Pages 277-281

  Brunken, Stephan ^a   Krause, Jonas ^a   Ellmer, Klaus ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

A1. Energy dispersive X ray diffraction; A1. Ni enhanced crystal growth; A3. Polycrystalline deposition; A3. Sputtering; B1. Laurite; B1. Sulfides; B2. Semiconducting II VI materials

Indexed keywords

COBALT; CRYSTALLINE MATERIALS; CRYSTALLITES; DEPOSITION; MAGNETRON SPUTTERING; NICKEL; RUTHENIUM; SCANNING ELECTRON MICROSCOPY; SPUTTERING; THIN FILMS;

B1. LAURITE; B1. SULFIDES; ENERGY DISPERSIVE X-RAY DIFFRACTIONS; POLY CRYSTALLINE DEPOSITION; SEMICONDUCTING II-VI MATERIALS;

X RAY DIFFRACTION;

EID: 84884289019     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2012.11.004     Document Type: Article

References (17)

1. D. Depla, S. Mahieu, Reactive sputter deposition, in: Springer Series in Material Science, Springer, Berlin, Heidelberg, New York, 2008.
2. K. Ellmer, A. Klein, B. Rech, Transparent conductive zinc oxide, in: Springer Series in Materials Science, Springer, Berlin, Heidelberg, New York, 2008.
3. X.-M. He, N. Baker, B.A. Kehler, K.C. Walter, M. Nastasi, Y. Nakamura, Structure, hardness, and tribological properties of reactive magnetron sputtered chromium nitride films, Journal of Vacuum Science and Technology A 18 (2000) 30-36.
4. K. Ellmer, J. Hinze, J. Klaer, Copper indium disulfide solar cell absorbers prepared in a one-step process by reactive magnetron sputtering from copper and indium targets, Thin Solid Films 413 (2002) 92-97. (Pubitemid 34777194)
5. 2 thin films on sapphire by radio frequency reactive sputtering, Applied Physics Letters 83 (2003) 1743-1745.
6. 2S from copper, indium, and tungsten targets, Journal of Applied Physics 105 (2009) 053305-053308.
7. 2 solar cells by reactive magnetron sputtering, Applied Physics Letters 88 (2006) 213502.
8. 2, Journal of Applied Electrochemistry 17 (1987) 613.
9. 2 enhancement of multiple band electrolysis, Solar Energy Materials and Solar Cells 70 (2002) 471-480. (Pubitemid 33034532)
10. P. Bogdanoff, C. Zachäus, S. Brunken, K. Ellmer, E. Martinez Moreno, A. Kratzig, S. Fiechter, Ruthenium sulphide thin layers as a catalyst for the electrooxidation of water, Physical Chemistry Chemical Physics, submitted for publication.
11. 2-x films, prepared by reactive magnetron sputtering, Thin Solid Films, submitted for publication.
12. 3, Thin Solid Films 245 (1994) 180-185.
13. S. Brunken, R. Mientus, K. Ellmer, In-situ energy-dispersive X-ray diffraction of metal sulfide assisted crystallization of strongly (001) textured photoactive tungsten disulfide thin films, Thin Solid Films 517 (2009) 3148-3151.
14. 2) films on metallic back contacts, Physica Status Solidi (a) 209 (2012) 317.
15. K. Ellmer, R. Mientus, V. Weiß, H. Rossner, In situ energy-dispersive x-ray diffraction system for time-resolved thin film growth studies, Measurement Science and Technology 14 (2002) 336-345. (Pubitemid 36380553)
16. B. Buras, L. Gerward, Application of X-ray energy-dispersive diffraction for characterization of materials under high pressure, Progress in Crystal Growth and Characterization 18 (1989) 93-138.
17. K. Ellmer, R. Mientus, V. Weiß, H. Rossner, Setup for in situ X-ray diffraction studies of thin film growth by magnetron sputtering, Nuclear Instruments and Methods in Physics Research A 467-468 (2001) 1041-1044. (Pubitemid 33732246)