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Volumn , Issue , 2013, Pages 615-618
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Low frequency arc-based MEMS structures for vibration energy harvesting
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Author keywords
circular arcs; energy harvesting; MEMS; microdevice; multilayer
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Indexed keywords
CIRCULAR ARC;
EFFECTIVE MECHANICAL PROPERTIES;
ENERGY EXTRACTION;
FINITE ELEMENT CODES;
MICRO-DEVICE;
NATURALLY OCCURRING;
VIBRATION ENERGY HARVESTING;
VIBRATION SOURCES;
ENERGY HARVESTING;
FINITE ELEMENT METHOD;
MEMS;
MULTILAYERS;
NATURAL FREQUENCIES;
NANOCANTILEVERS;
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EID: 84883056446
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/NEMS.2013.6559805 Document Type: Conference Paper |
Times cited : (10)
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References (5)
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