Development of a ta-C diamond-like carbon (DLC) coating by magnetron sputtering for use in precision glass molding

Materialwissenschaft und Werkstofftechnik

Volumn 44, Issue 8, 2013, Pages 661-666

  Bernhardt, F ^a   Georgiadis, K ^a   Dolle, L ^a   Dambon, O ^a   Klocke, F ^a  

^a FRAUNHOFER INSTITUTE FOR PRODUCTION TECHNOLOGY IPT   (Germany)

Author keywords

Diamond like carbon; DLC; Ionenplattieren; MSIP Sputtern; Pr zisionsblankpressen; ta C; thermo chemische Best ndigkeit

Indexed keywords

DIAMOND-LIKE CARBON; DLC; IONENPLATTIEREN; MSIP-SPUTTERN; TA-C;

DIAMONDS; GLASS; ION IMPLANTATION; MAGNETRON SPUTTERING; MOLDING; SCANNING ELECTRON MICROSCOPY;

COATINGS;

EID: 84882638839     PISSN: 09335137     EISSN: 15214052     Source Type: Journal    
DOI: 10.1002/mawe.201300171     Document Type: Article

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