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Thin Solid Films

Volumn 542, Issue , 2013, Pages 399-403

Vacuum nanogap formation in multilayer structures by an adhesion-controlled process

(4) Taliashvili, Z a Tavkhelidze, A b Jangidze, L a Blagidze, Y c

a TBILISI STATE UNIVERSITY (Georgia)

b ILIA STATE UNIVERSITY (Georgia)

c INSTITUTE OF CYBERNETICS (Georgia)

Author keywords

Adhesion; Electroplating; Nanogap; Thermoelectric; Thermotunnel; Tunneling

Indexed keywords

LOW ADHESION; MULTILAYER STRUCTURES; NANO-GAP; SI SUBSTRATES; THERMO-TUNNELING; THERMOELECTRIC; THERMOTUNNEL; THIN METAL FILMS;

ADHESION; COPPER; ELECTRODES; ELECTRON TUNNELING; ELECTROPLATING; ENERGY CONVERSION; METALLIC FILMS; MICHELSON INTERFEROMETERS; MULTILAYERS; SEPARATION; SILICON; SUBSTRATES; THERMAL EXPANSION; VACUUM;

SILVER;

EID: 84881310227 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.06.089 Document Type: Article

Times cited : (2)

References (25)

1
- 0042048074
- A.N. Korotkov, M.R. Samuelsen, and S.A. Vasenko J. Appl. Phys. 76 1994 3623
- (1994) J. Appl. Phys. , vol.76 , pp. 3623
- Korotkov, A.N.¹ Samuelsen, M.R.² Vasenko, S.A.³

2
- 84949804127
- (New York)
- A. Tavkhelidze, G. Skhiladze, A. Bibilashvili, L. Tsakadze, L. Jangidze, Z. Taliashvili, I. Cox, and Z. Berishvili Proc. XXI International Conf. on Thermoelectric, August 26-29 IEEE 2002 435 (New York)
- (2002) Proc. XXI International Conf. on Thermoelectric, August 26-29 IEEE , pp. 435
- Tavkhelidze, A.¹ Skhiladze, G.² Bibilashvili, A.³ Tsakadze, L.⁴ Jangidze, L.⁵ Taliashvili, Z.⁶ Cox, I.⁷ Berishvili, Z.⁸

3
- 0035938301
- Y. Hishinuma, T.H. Geballe, B.Y. Moyzhes, and T.W. Kenny Appl. Phys. Lett. 78 2001 2572
- (2001) Appl. Phys. Lett. , vol.78 , pp. 2572
- Hishinuma, Y.¹ Geballe, T.H.² Moyzhes, B.Y.³ Kenny, T.W.⁴

4
- 33646128001
- T. Zeng Appl. Phys. Lett. 88 2006 153104
- (2006) Appl. Phys. Lett. , vol.88 , pp. 153104
- Zeng, T.¹

5
- 84878219052
- Z. Xin, and Z. Dian-Lin Chinese Phys. 16 2007 2656
- (2007) Chinese Phys. , vol.16 , pp. 2656
- Xin, Z.¹ Dian-Lin, Z.²

6
- 37849028718
- A. Tavkhelidze, V. Svanidze, and L. Tsakadze J. Vac. Sci. Technol. A 26 2008 5
- (2008) J. Vac. Sci. Technol. A , vol.26 , pp. 5
- Tavkhelidze, A.¹ Svanidze, V.² Tsakadze, L.³

7
- 0142025570
- Y. Hishinuma, T.H. Geballe, B.Y. Moyzhes, and T.W. Kenny Appl. Phys. Lett. 94 2003 4690
- (2003) Appl. Phys. Lett. , vol.94 , pp. 4690
- Hishinuma, Y.¹ Geballe, T.H.² Moyzhes, B.Y.³ Kenny, T.W.⁴

8
- 77956338151
- A.N. Tavkhelidze J. Appl. Phys. 108 2010 044313
- (2010) J. Appl. Phys. , vol.108 , pp. 044313
- Tavkhelidze, A.N.¹

9
- 84855186433
- E.A. Chávez-Urbiola, Yu.V. Vorobiev, and L.P. Bulat Sol. Energy 86 2012 369
- (2012) Sol. Energy , vol.86 , pp. 369
- Chávez-Urbiola, E.A.¹ Vorobiev, Yu.V.² Bulat, L.P.³

10
- 77953731413
- CRC Press Solutions for Sustainability and Energy in the Built Environment
- G.B. Smith, and C.G. Granqvist Green Nanotechnology 2011 CRC Press Solutions for Sustainability and Energy in the Built Environment
- (2011) Green Nanotechnology
- Smith, G.B.¹ Granqvist, C.G.²

11
- 84881317884
- S.C. Mukhopadhyay, H. Leng, Springer
- C. Knight, and J. Davidson S.C. Mukhopadhyay, H. Leng, Advances in Wireless Sensors and Sensor Networks 2010 Springer 221
- (2010) Advances in Wireless Sensors and Sensor Networks , pp. 221
- Knight, C.¹ Davidson, J.²

12
- 77950475965
- L.P. Bulat, and D.A. Pshena-Severin Phys. Solid State 52 2010 485
- (2010) Phys. Solid State , vol.52 , pp. 485
- Bulat, L.P.¹ Pshena-Severin, D.A.²

13
- 33947669904
- Y.C. Gerstenmaier, and G. Wachutka AIP Conf. Proc. 890 2007 349
- (2007) AIP Conf. Proc. , vol.890 , pp. 349
- Gerstenmaier, Y.C.¹ Wachutka, G.²

14
- 9744228664
- G. Despesse, and T. Jager J. Appl. Phys. 96 2004 5026
- (2004) J. Appl. Phys. , vol.96 , pp. 5026
- Despesse, G.¹ Jager, T.²

15
- 84946096591
- H.J. Goldsmid Proceedings ICT'03. 22nd International Conference on Thermoelectrics 2003 433
- (2003) Proceedings ICT'03. 22nd International Conference on Thermoelectrics , pp. 433
- Goldsmid, H.J.¹

16
- 80053419838
- M.H. Tanielian, R.B. Greegor, J.A. Nielsen, and C.G. Parazzoli Appl. Phys. Lett. 99 2011 123104
- (2011) Appl. Phys. Lett. , vol.99 , pp. 123104
- Tanielian, M.H.¹ Greegor, R.B.² Nielsen, J.A.³ Parazzoli, C.G.⁴

17
- 84878251542
- L. Jangidze, A. Tavkhelidze, Y. Blagidze, and Z. Taliashvili J. Electrochem. Soc. 159 2012 D413
- (2012) J. Electrochem. Soc. , vol.159 , pp. 413
- Jangidze, L.¹ Tavkhelidze, A.² Blagidze, Y.³ Taliashvili, Z.⁴

18
- 84903656030
- Elsevier
- P. Hariharan Optical Interferometry 2003 Elsevier
- (2003) Optical Interferometry
- Hariharan, P.¹

19
- 77953146866
- T. Tolkea, A. Kriltzb, and A. Rechtenbacha Thin Solid Films 518 2010 4242
- (2010) Thin Solid Films , vol.518 , pp. 4242
- Tolkea, T.¹ Kriltzb, A.² Rechtenbacha, A.³

20
- 0004028468
- Cambridge university press
- J.A. Venables Introduction to Surface and Thin Film Processes 2000 Cambridge university press 4
- (2000) Introduction to Surface and Thin Film Processes , pp. 4
- Venables, J.A.¹

21
- 0037233037
- U. Diebold Surf. Sci. Rep. 48 2003 53
- (2003) Surf. Sci. Rep. , vol.48 , pp. 53
- Diebold, U.¹

22
- 84873740901
- S.-Y. Jung, T.-J. Ha, C.-S. Park, W.-S. Seo, Y.S. Lim, S. Shin, H.H. Cho, and H.-H. Park Thin Solid Films 529 2013 94
- (2013) Thin Solid Films , vol.529 , pp. 94
- Jung, S.-Y.¹ Ha, T.-J.² Park, C.-S.³ Seo, W.-S.⁴ Lim, Y.S.⁵ Shin, S.⁶ Cho, H.H.⁷ Park, H.-H.⁸

23
- 84862811668
- N. Duraisamya, N.M. Muhammada, H.-C. Kimb, J.-D. Joc, and K.-H. Choi Thin Solid Films 520 2012 5070
- (2012) Thin Solid Films , vol.520 , pp. 5070
- Duraisamya, N.¹ Muhammada, N.M.² Kimb, H.-C.³ Joc, J.-D.⁴ Choi, K.-H.⁵

24
- 0142159473
- Cambridge University Press
- L.B. Freund, and S. Suresh Thin Film Materials: Stress, Defect Formation and Surface Evolution 2003 Cambridge University Press
- (2003) Thin Film Materials: Stress, Defect Formation and Surface Evolution
- Freund, L.B.¹ Suresh, S.²

25
- 3543095534
- D.S. Balint, and J.W. Hutchinson J. Appl. Mech. 68 2001 725
- (2001) J. Appl. Mech. , vol.68 , pp. 725
- Balint, D.S.¹ Hutchinson, J.W.²

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