Cmos-integrable ultrathin SnO2 layer for smart gas sensor devices

Procedia Engineering

Volumn 47, Issue , 2012, Pages 490-493

  Mutinati, G C ^a   Brunet, E ^a   Steinhauer, S ^a   Kock A ^a   Teva, J ^b   Kraft, J ^b   Siegert, J ^b   Schrank, F ^b   Bertagnolli, E ^c  

^a AIT AUSTRIAN INSTITUTE OF TECHNOLOGY   (Austria)

^b AMS AG   (Austria)

^c VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Gas sensors; Heterogeneous integration

Indexed keywords

EID: 84881152241     PISSN: 18777058     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2012.09.191     Document Type: Conference Paper

References (5)

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5. 2 gas sensors fabricated by spray pyrolysis for the detection of humidity and carbon monoxide. Sensors and Actuators B: Chemical 2008; 134:796-802.