Design, fabrication and characterization of a micromachined piezoelectric energy harvester excited by ambient vibrations

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8763, Issue , 2013, Pages

  Alamin Dow, Ali B ^a   Bittner, Achim ^b   Schmid, Ulrich ^b   Kherani, Nazir P ^a  

^a UNIVERSITY OF TORONTO   (Canada)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Aluminum nitride; Energy harvesting; Piezoelectricity; Vibration

Indexed keywords

AMBIENT VIBRATIONS; ELECTRIC POWER; FABRICATION AND CHARACTERIZATIONS; MICRO-MACHINED; PIEZOELECTRIC ENERGY HARVESTERS; RANDOM VIBRATIONS; SILICON CANTILEVER BEAM; VIBRATION;

ACTUATORS; ALUMINUM NITRIDE; CANTILEVER BEAMS; CRYSTALLOGRAPHY; DESIGN; ENERGY HARVESTING; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; SMART SENSORS;

SEISMIC DESIGN;

EID: 84881150509     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2017814     Document Type: Conference Paper

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