Electromagnetic fields in a radio-frequency induction plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 11, Issue 1, 1993, Pages 147-151

  Hopwood, J ^a   Guarnieri, C R ^a   Whitehair, S J ^a   Cuomo, J J ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3-D FINITE ELEMENTS; ELECTRON PLASMA FREQUENCY; LOW PRESSURE PLASMA; MAXWELL'S EQUATIONS; NUMERICAL SOLUTION; RADIO FREQUENCIES; RF ELECTRIC FIELDS; RF MAGNETIC FIELDS;

ELECTRIC FIELDS; ELECTROMAGNETIC FIELDS; PLASMA SOURCES; QUARTZ;

ELECTRIC DISCHARGES;

EID: 84881141054     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578281     Document Type: Article

References (11)

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