Fabrication of Al/AlOx/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process

Chinese Physics B

Volumn 22, Issue 6, 2013, Pages

  Wu, Yu Lin ^a   Deng, Hui ^a   Yu, Hai Feng ^a   Xue, Guang Ming ^a   Tian, Ye ^a   Li, Jie ^a   Chen, Ying Fei ^a   Zhao, Shi Ping ^a   Zheng, Dong Ning ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

Al AlOx Al; Josephson junction; superconducting qubit

Indexed keywords

INTENSIVE RESEARCH; JOSEPHSON-JUNCTION; QUANTUM COMPUTING; QUANTUM PHENOMENA; SHADOW EVAPORATION; SUPERCONDUCTING FLUX; SUPERCONDUCTING QUANTUM CIRCUIT; SUPERCONDUCTING QUBITS;

ALUMINUM; ELECTRON BEAM LITHOGRAPHY; FABRICATION; JOSEPHSON JUNCTION DEVICES; OXIDATION RESISTANCE; QUANTUM COMPUTERS; QUANTUM OPTICS; SUPERCONDUCTING MATERIALS;

QUANTUM THEORY;

EID: 84880530311     PISSN: 16741056     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-1056/22/6/060309     Document Type: Article

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