Silicon passivation and tunneling contact formation by atomic layer deposited Al2O3/ZnO stacks

Semiconductor Science and Technology

Volumn 28, Issue 8, 2013, Pages

  Garcia Alonso, D ^a   Smit, S ^a   Bordihn, S ^a,b   Kessels, W M M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b HANWHA Q CELLS GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITED; CONTACT FORMATION; P-TYPE SI; PHOTOVOLTAICS; SINGLE LAYER; SURFACE PASSIVATION; SURFACE RECOMBINATION VELOCITIES; TUNNELING CURRENT;

ATOMIC LAYER DEPOSITION; HETEROJUNCTIONS; PASSIVATION; SEMICONDUCTOR DOPING; SILICON; ZINC OXIDE;

ALUMINUM;

EID: 84880293546     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/28/8/082002     Document Type: Article

References (22)

1. Hoex B, Heil S B S, Langereis E, van de Sanden M C M and Kessels W M M 2006 Appl. Phys. Lett. 89 042112 (Pubitemid 44147566)
2. Dingemans G and Kessels W M M 2012 J. Vac. Sci. Technol. A 30 040802
3. Kessels W M M and Putkonen M 2011 MRS Bull. 36 907-13
4. Poodt P, Cameron D C, Dickey E, George S M, Kuznetsov V, Parsons G N, Roozeboom F, Sundaram G and Vermeer A 2012 J. Vac. Sci. Technol. A 30 010802
5. van Delft J-A, Garcia-Alonso D and Kessels W M M 2012 Semicond. Sci. Technol. 27 074002
6. Bakke J R, Pickrahn K L, Brennan T P and Bent S F 2011 Nanoscale 3 3482-508
7. Dingemans G and Kessels W M M 2011 ECS Trans. 42 293-301
8. Zielke D, Petermann J H, Werner F, Veith B, Brendel R and Schmidt J 2011 Phys. Status Solidi RRL 5 298-300
9. Swanson R M 2005 31st IEEE Photovoltaic Specialists Conf. (Florida,) pp 889-94
10. Hezel R and Jaeger K 1989 J. Electrochem. Soc. 136 518-23
11. Song D and Guo B 2009 J. Phys. D: Appl. Phys. 42 025103
12. Würfel P 2009 Physics of Solar Cells. From Basic Principles to Advanced Concepts (Weinheim: Wiley)
13. Illiberi A, Roozeboom F and Poodt P 2012 ACS Appl. Mater. Interfaces 4 268-72
14. Stangl R, Leendertz C and Haschke J 2010 Numerical simulation of solar cells and solar cell characterization methods: the open-source on demand program AFORS-HET in Solar Energy ed R D Rugescu (Croatia: InTech) chapter 14
15. Kanevce A and Metzger W K 2009 J. Appl. Phys. 105 094507
16. de Wolf S, Descoeudres A, Holman Z and Ballif C 2012 Green 2 7-24
17. Dingemans G, Seguin R, Engelhart P, van de Sanden M C M and Kessels W M M 2010 Phys. Status Solidi RRL 4 10-12
18. Maezawa A, Okamoto Y and Imanaka T 1987 J. Chem. Soc. Faraday Trans. I 83 665-74
19. Terlinden N M, Dingemans G, van de Sanden M C M and Kessels W M M 2010 Appl. Phys. Lett. 96 112101
20. Schneiderlöchner E, Preu R, Lüdemann R and Glunz S W 2002 Prog. Photovolt. Res. Appl. 10 29-34 (Pubitemid 34133757)
21. Gielis J J H, Hoex B, van de Sanden M C M and Kessels W M M 2008 J. Appl. Phys. 104 073701
22. You J B, Zhang X W, Zhang S G, Tan H R, Ying J, Yin Z G, Zhu Q S and Chu P K 2010 J. Appl. Phys. 107 083701