Integrated LTCC gas flow sensor with measuring device

4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008

Volumn , Issue , 2008, Pages 520-525

  Jurków, Dominik ^a   Golonka, Leszek ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Flow; Gas; LTCC; Microcontroller; Sensor

Indexed keywords

ELECTRONIC DEVICE; FLOW; FREQUENCY MEASUREMENTS; LOW-TEMPERATURE CO-FIRED CERAMICS; LTCC; MICROCONTROLLER DEVICES; OPTOELECTRONIC METHOD; ROTATIONAL SPEED;

CERAMIC MATERIALS; CONTROLLERS; FLOW OF GASES; GAS METERS; GASES; LIQUID CRYSTAL DISPLAYS; MICROCONTROLLERS; MICROSYSTEMS; SENSORS; TURBINES;

ELECTRON DEVICES;

EID: 84880091339     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. M.R. Gongora-Rubio, P. Espinoza-Vallejos, L. Sola-Laguna, J.J. Santiago-Aviles, "Overview of low temperature co-fired ceramics tape technology for meso-system technology" (MsST), Sensors and Actuators, Vol. A, No. 89, pp. 222-241, 2001
2. M. Gongora-Rubio, L.M. Solá-Laguna, P.J. Moffett, J.J. Santiago-Avilés, "The utilisation of low temperature co-fired ceramic (LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor", Sensors and Actuators, Vol. A, No. 73, pp. 215-221, 1999
3. D. Jurków, L. J. Golonka, H. Roguszczak "LTCC gas flow detector", Proceedings of the European Microelectronics and Packaging Conference & Exhibition (EMPC), Oulu (Finland), June 17-20, pp. 204-207, 2007
4. D. Jurków, L. J. Golonka, H. Roguszczak "LTCC gas flow sensor", Proceedings of the XXXI International Conference IMAPS Poland Chapter, (IMAPS), Rzeszow-Krasiczyn (Poland), September 23-26, pp. 279-283, 2007
5. D. Jurków, L. J. Golonka, H. Roguszczak "LTCC gas flow sensor", Elektronika, No. 12, pp. 63-64, December, 2007
6. K.A. Peterson, K.D. Patel, C.K. Ho, S.B. Rohde, C.D. Nordquist, C.A. Walker, B.D. Wroblewski, M. Okandam, "Novel microsystem applications with new techniques in Low Temperature Co-Fired Ceramics", International Journal of Applied Ceramics Technology, vol. 2, pp. 345-363, 2005
7. K.A. Peterson, K.D. Patel, C.K. Ho, B.R. Rohrer, C.D. Nordquist, B.D. Wroblewski, K.B. Pfeifer, "LTCC microsystems and microsystem packaging and integration applications", Proceedings of the IMAPS/AcerS 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystem Technologies (CICMT), Denver (USA), April, 24-27, 2006
8. J. Kita, A. Dziedzic, L.J. Golonka, T. Zawada, "Laser treatment of LTCC for 3D structures and elements", Microelectronics International, vol. 19 (3), pp. 14-18, 2002.
9. L.J. Golonka, "Technology and applications of Low Temperature Cofired Ceramic (LTCC) based sensors and microsystems", Bulletin of the Polish Academy of Sciences Technical Sciences, Vol. 54, No. 2, pp. 223-233, 2006.