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Volumn 307, Issue , 2013, Pages 46-49
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High extinction ratio polarization beam splitter with multimode interference coupler on SOI
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Author keywords
Multimode interference (MMI); Polarization beam splitter (PBS); Quasi state imaging; Silicon on insulator (SOI)
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Indexed keywords
E-BEAM LITHOGRAPHY;
HIGH EXTINCTION RATIOS;
INDUCED COUPLED PLASMAS;
MULTI-MODE INTERFERENCE;
MULTIMODE INTERFERENCE COUPLERS;
POLARIZATION BEAM SPLITTERS;
SILICON ON INSULATOR;
SILICON-ON-INSULATORS;
INTEGRATED OPTICS;
OPTICAL INSTRUMENTS;
PLASMA ETCHING;
POLARIZATION;
PRISMS;
SILICON ON INSULATOR TECHNOLOGY;
LIGHT EXTINCTION;
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EID: 84879968816
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/j.optcom.2013.05.055 Document Type: Article |
Times cited : (63)
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References (21)
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