Far infrared low-cost uncooled bolometer for automotive use

Advanced Microsystems for Automotive Applications 2007

Volumn , Issue , 2007, Pages 265-278

  Kvisteroy T ^a   Jakobsen, H ^a   Vieider, C ^b   Wissmar, St ^b   Ericsson, P ^b   Halldin, U ^b   Niklaus, F ^c   Forsberg, Fr ^c   Stemme, G ^c   Kallhammer J E ^d   Pettersson, H ^d   Eriksson, D ^d   Franks, J ^e   VanNylen, J ^e   Vercammen, H ^e   Van Hulsel, A ^e  

^a Infineon Technologies SensoNor AS   (Norway)

^b ACREO AB   (Sweden)

^c ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^d AUTOLIV RESEARCH   (Sweden)

^e Umicore Electro Optic Materials ^*  (United States)

Author keywords

Bolometer; MEMS; PIMS; Uncooled; Wafer scale

Indexed keywords

AUTOMATIC BRAKES; PEDESTRIAN INJURIES; PIMS; PRODUCTION YIELD; SENSING SYSTEMS; UNCOOLED; WAFER LEVEL VACUUM PACKAGING; WAFER SCALE;

AUTOMOBILES; AUTOMOTIVE INDUSTRY; INFRARED DETECTORS; MEMS; MICROSYSTEMS; PEDESTRIAN SAFETY; SENSORS; VEHICLES;

BOLOMETERS;

EID: 84879962672     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-540-71325-8_21     Document Type: Conference Paper

References (18)

1. SAVE-U EU Project Deliverable 1-A, "Vulnerable Road User Scenario Analysis", http://www.save-u.org/download/PDF/D1A-V4.pdf, downloaded 15 Feb. 2006.
2. D. M. Gavrila, "Sensor-based Pedestrian Protection", IEEE Intelligent Systems, Vol. 16 (6), pp.77-81, 2001.
3. G. J. L. Lawrence, B. J. Hardy, J. A. Carroll, W. M. S. Donaldson, C. Visvikis, and D. A. Peel, "A study on the feasibility of measures relating to the protection of pedestrians and other vulnerable road users - Final report", http://europa.eu.int/comm/enterprise/automotive/pagesbackground/ pedestrianprotection/pedestrian-protection-study.pdf, EU Contract no FIF. 20030937, downloaded 15 Feb 2006.
4. Hannawald L., Krauer F., "Equal effectiveness study on pedestrian protection", Dresden, Germany: Technische Universität Dresden, http://europa.eu.int/comm/enterprise/automotive/pagesbackground/ pedestrianprotection/summary-on-effectiveness.pdf, downloaded 15 Feb 2006.
5. Meinecke M.M, Obojski M.A., Gavrila, D., Marc E., Morris R., Töns M., Letellier L. "Deliverable D6: Strategies in Terms of Vulnerable Road User Protection" http://www.save-u.org/download/PDF/D6-V3.0.pdf, downloaded 15 Feb 2006.
6. J.J. Yon, L. Biancardini, J.L. Tissot, L. Letellier, "Infrared microbolometer sensors and their application in automotive safety", Proc. AMAA 2003, pp.1-15, Berlin, Germany, http://www.save-u.org/download/PDF/AMAA- 200305.pdf, 2003.
7. The Eurimus/EUREKA web site, http://www.eurimus.com/index.php?flashOK=10
8. F. Niklaus, J. Pejnefors, M. Dainese, M. Haggblad, P.-E. Hellström, U.J. Wallgren, G. Stemme, "Characterization of transfer-bonded silicon bolometer arrays", Proc. SPIE, Vol. 5406, pp. 521-530, Orlando, USA, 2004.
9. F. Niklaus, E. Kälvesten, G. Stemme, "Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arrays", Journal of Micromechanics and Microengineering, Vol. 11, pp. 509-513, 2001.
10. F. Niklaus, G. Stemme, J.-Q. Lu, R.J. Gutmann, "Adhesive wafer bonding", Journal of Applied Physics: Applied Physics Reviews, Vol. 99, No. 3, pp.031101/1-031101/28, 2006.
11. M. Kohin, N. Buttler, "Performance limits of uncooled VOx microbolometer focal plane arrays", Proc. SPIE 2004, Vol. 5406, pp.447-453, Orlando, USA.
12. E. Mottin, A. Bain, J.L. Martin, J.L. Ouvrier-Buffet, S. Bisotto, J.J. Yon, J.L. Tissot, "Uncooled amorphous silicon technology enhancement for 25 μm pixel pitch achievement", Proc. SPIE 2003, Vol. 4820, pp. 200-207, Seattle, USA.
13. S.G.E. Wissmar, L. Höglund, J.Y. Andersson, C. Vieider, S. Savage, P. Ericsson; "High signal-to-noise ratio quantum well bolometer materials"; Proc. SPIE Vol. 6401, 64010N, Optical Materials in Defence Systems Technology III.
14. P.W. Kruse, "Can the 300 K radiating background noise limit be attained by uncooled thermal imagers?", Proc. SPIE, Vol. 5406, pp.437-446, Orlando, USA, 2004.
15. C. Jansson, U. Ringh, K. Liddiard, N. Robinson, "FOA/DSTO uncooled IRFPA development", Proc. SPIE 1999, Vol. 3698, pp. 264-275, Orlando, USA.
16. J.J. Yon, L. Biancardini, J.L. Tissot, L. Letellier, "Infrared microbolometer sensors and their application in automotive safety", Proc. AMAA 2003, pp.1-15, Berlin, Germany.
17. XenIC preliminary datasheet: "8 - 10μm Micromachined Bolometer", March 2003, Belgium.
18. Roy Grelland, Christian Burrer, Matthias Halsband, Ronny Weum, "Direct measuring Tire Pressure Monitoring Systems", Sensors Expo, Chicago 2004.