Thermomechanical design, hybrid fabrication, and testing of a MOEMS deformable mirror

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 12, Issue 1, 2013, Pages

  Reinlein, Claudia ^a   Appelfelder, Michael ^a   Gebhardt, Sylvia ^b   Beckert, Erik ^c   Eberhardt, Ramona ^c   Tünnermann, Andreas ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b FRAUNHOFER INSTITUTE FOR CERAMIC TECHNOLOGIES AND SYSTEMS   (Germany)

^c FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; DEFORMATION; DESIGN; LASER MIRRORS; MICROELECTRONICS; MIRRORS; OPTIMIZATION; THERMAL LOAD;

HOMOGENEOUS LOADINGS; LASER-INDUCED DEFORMATIONS; LOW TEMPERATURE CO-FIRED CERAMICS; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; PIEZO-CERAMIC ACTUATORS; THERMO-MECHANICAL DESIGN; THERMOMECHANICAL MODEL; THERMOMECHANICAL MODELING;

LOADING;

EID: 84879908120     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.JMM.12.1.013016     Document Type: Article

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